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REZI® 78 ash residue remover, J.T.Baker®

Supplier: AVANTOR PERFORMANCE MATERIALS

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6434-10EA 0 INR InStock
6434-10 6434-09
REZI® 78 ash residue remover, J.T.Baker®
REZI®
J.T.Baker® REZI™-78 IC surface cleaner is an effective etch/ash residue and sidewall polymer removal chemistry for metal and via structures. The product is designed to be environmentally friendly and provides a lower total cost of ownership in most cleaning processes.

  • Suitable for BEOL, contact clean and FEOL applications
  • Compatible with aluminum, copper, silicon dioxide, nickel silicide, CoWP, and most low-k dielectrics
  • Proven capability on bath, spray, and single-wafer tools
  • Cleans at lower temperature/shorter time
  • Does not contain NMP, Fluoride, Catechol or Hydroxylamine
  • Eliminates the need for intermediate solvent rinses resulting in lower cost of ownership.
  • Reduces waste treatment costs


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